Mega Fluid Systems Information

Experts in chemical and slurry blend and delivery for the semiconductor market, including solar, LED and UHP industries. Our state-of-the-art systems continue to be chosen by leading-edge clients to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes. Mega, Kinetics Fluid Systems offers world-class engineering, manufacturing and testing capabilities. Our partners benefit from high-level customer service and support from our program management, sales, engineering, service and executive management teams. Mega is owned by Kinetics and located in Tualatin, Oregon, with sales and engineering offices in Chandler, AZ, and Hsinchu, Taiwan, and a strong field service presence in Malta, NY, Boise, ID, and Tualatin, OR. Mega is a proud member of SEMI.