Helyssen Information

Helyssen Sàrl is a Swiss deep-tech company specializing in advanced plasma technology, with a core focus on the design and development of high-efficiency inductively coupled and wave-heated RF plasma sources. Founded in 2003 by Dr. Philippe Guittienne, a recognized expert in plasma physics, Helyssen is an EPFL spin-off with its research laboratory based at the Swiss Plasma Center (SPC) at EPFL in Lausanne, Switzerland Mission Helyssen’s mission is to drive innovation in plasma technology, enabling the next generation of industrial processes through scalable, energy-efficient, and high-performance plasma sources What We Do Helyssen delivers cutting-edge solutions for industrial plasma applications, particularly serving the semiconductor, solar cell, MEMS, thin film, glass coating, food packaging, and fusion energy sectors. The company is renowned for its proprietary resonant network concept, which represents a breakthrough in plasma source technology. This innovation enables high-density plasma generation with low power requirements and is fully scalable for large-area industrial processes Key Technologies & Specialties • Inductively coupled plasma (ICP) sources • Helicon discharge and planar plasma sources • High-density plasma for semiconductor manufacturing (ICs, MEMS, solar cells) • Plasma processing for food packaging and thin film deposition • RF plasma sources for advanced material treatment and fusion applications Milestones and Partnerships Helyssen has a strong track record of collaborative R&D and industrial partnerships, including: • Development of helicon sources for Alcatel Vacuum Technology France • Large-area plasma source projects with Tetra Pak for food packaging innovation • Next-generation solar cell equipment with Tokyo Electron Solar and Applied Materials • Eurofusion project: 10kW helicon plasma generator for negative hydrogen ion sources (DEMO/ITER) • Roll-to-roll plasma source integration for Bobst SA