Helyssen Information

Helyssen produces high efficiency inductively coupled and wave heated RF plasma sources. Helyssen know-how concerns essentially the physics and design of radio frequency helicon plasma sources. Plasma processes play a central role in many industrial applications, especially for semiconductor industries (integrated circuits, solar cells, MEMS). Helyssen is an EPFL Spin-off and has its Labs at the Swiss Federal Institute of Technology (EPFL) Dr Philippe Guittienne founded Helyssen in 2003 to develop and commercialize application licenses on proprietary technologies. Since inception, Helyssen research lab is located in the Swiss Plasma Center (SPC) in EPFL and collaborate closely with Dr Furno’s industrial plasma group. Major milestones include: FIT grant of CHF 100’000 in 2006 for best innovative company Patents application for Helyssen’s antennas Development of an Helicon source sponsored by Alcatel Vacuum technology France (2004-2005) Collaboration sponsored by the CTI  (9896.2) between CRPP / Tetra Pak / Helyssen between 2009 and 2012 to develop large area plasma source for Tetra Pak industrial food application. CTI project (2013/16)to develop Tetra Pak next generation food packaging solution CTI project TEL / Applied Materials (June 2013-Dec 2014) to develop next generation solar cells production equipment Eurofusion project: Helyssen developed a 10kW helicon plasma generator for negative hydrogen ion source for DEMO (next generation of ITER) between (2014/18) CTI project EPFL SPC/ ETHZ   : Development of a high pressure resonant network plasma source for particle treatment (June 2017- Dec 18) 2018:  Development of high-power large scale plasma source for Tetra Pak food processing application 2019 -23: Integration of a roll-to-roll plasma source at Bobst for food packaging application Development of a 10kW flat helicon plasma source for negative hydrogen ion for fusion application Integration of high pressure ICP plasma source at Annealsys