Mega Fluids Information

Founded in 1990, Mega Fluid Systems, Inc. has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals and solar/PV industries. With a global base in Asia, Europe and North America, our state-of-the-art systems continue to be chosen by leading customers worldwide to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes. Mega Fluid Systems offers world-class engineering, manufacturing and testing capabilities. Mega's partners benefit from high-level customer service and support from our program management, sales, engineering, service and executive management teams. Mega is headquartered in Tualatin, Oregon, with sales and engineering offices around the globe. www.megafluidsystems.com