Lurie Nanofabrication Facility Information

The Lurie Nanofabrication Facility serves technology educators and creators through broad access to advanced nanofabrication equipment and staff expertise in a safe, collaborative environment. We enable multi-disciplinary research, experiential learning, and co-operation with industry to advance cutting-edge technologies. We offer a state-of- the-art 24/7 facility with 13,500 sq. ft of cleanroom space, which provides advanced micro- and nano-fabrication equipment and expertise to the research community. LNF supports and enables cutting edge research, from semiconductor materials and devices, electronic circuits, solid-state lighting, energy, biotechnology, medical devices and unconventional materials and processing technologies. It is a shared user facility and currently serves over 400 users from academia, government and industry, offering a fertile ground for collaboration among student users, faculty groups, and non-academic researchers.