Exnodes Information

Exnodes detects 20 nanometer defects at 120 wafers per hour to maximize yield of computer chips. To license Exnodes technology and patents for your next generation product, please write to us at onboard@exnodes.com Using an 8.9 nanometer sensitivity breakthrough with visible light, computational parallel inspection (CPI) enables unpatterned wafer inspection without the baggage of DUV. While standard methods rely on brute force increasing of scattered signal levels with shorter wavelengths, CPI rethinks nanoscale defect detection with information theory and maximizes sensitivity by leveraging the maturity and gentleness of visible light. Exnodes is made possible by world’s leading semiconductor companies and by inventors, builders and nurturers determined to make the nanoscale accessible for all of us.