Critical Process Systems Group Information

Critical Process Systems (CPS) Group is a group of manufacturing and design companies providing innovative product solutions to the semiconductor, life science, high-purity chemical processing, gas systems, and wastewater industries. We provide a broad range of products & services including high purity gas and chemical blending and delivery control, pre-fabricated high purity process utility modules, corrosive fume exhaust duct, and airflow control devices. With the breadth of our product offerings and engineering capabilities we can offer comprehensive turnkey solutions or targeted niche products depending on each customer’s needs and desires. CPS Group companies provide leading edge integrated process systems, equipment & services that streamline engineering coordination, procurement, fabrication and installation for our customers, reducing overall cost and schedule by 30%. CPS Group Companies and Capabilities Include: • Airgard - Point-of-Use hazardous gas abatement using Wet and Wet-Burn-Wet Scrubber technologies • BioPharm Engineered Systems - Custom Engineered Biopharmaceutical Equipment • CPS Process Solutions - Fully Integrated Design Services for Life Science Facilities • Diversified Fluid Solutions - UHP Chemical and Gas Delivery & Blending Systems • ENGVT - Advanced Process Facility Engineering, BIM and Modular MEP • Fab-Tech Inc. - Coated Stainless-Steel Corrosive Fume Exhaust Duct & Accessories • NEHP Inc. - Large-scale Process Utility Modularization • NSI - Advanced Precursor Ampoules, Liquid Level Sensing Technology, and UHP Gas & Chemical Delivery Systems